Michael SCHNEIDER
VON ARDENNE GmbH, Am Hahnweg 8, 01328 Dresden, Germany
Among the high challenges of coating technology for optical interference filters and dielectric mirrors are deposition precision and stable reproducibility. These requirements are already very demanding for micro-optical substrate surfaces or optical components below 200 mm aperture area, especially when volume production with high quantities is also involved. Magnetron sputtering technology offers a suitable process that also allows the high precision and stable reproducibility required for alternating layer systems to be transferred to large-area optical substrates.
Markets such as laser technology and augmented reality (AR/VR/XR) are driving demand for interference-optical filters and reflective coatings on large-area components. They are used, for example, in beam guidance, laser protection, 3D projection systems or functional displays. In the talk, coating solutions required for this purpose for aperture areas up to 300 mm and beyond will be presented and technical challenges for optical manufacturing will be discussed. Some coating results will be presented and the coating of large optics for laser technology will also be covered.
References
[1] Michael Schneider, Stefan Bruns, Kristin Galonska, Michael Vergöhl, Philipp Henning, Thomas Melzig, "Sputtering platform for double-sided precision optical coatings," Proc. SPIE 12002, Oxide-based Materials and Devices XIII, 120020C (5 March 2022); doi: 10.1117/12.2607764